Ultra Pure Water Management in Semiconductor Manufacturing
Experts discuss ultra pure water reuse and quality control in semiconductor fabs. AZoMaterials interviews METTLER TOLEDO on the critical role of ultra-pure water management.
Ultra-pure water (UPW) is essential in semiconductor fabs, used in etching, cleaning, and chemical mechanical planarization (CMP). The semiconductor industry is the world's largest UPW consumer.
- Pretreatment of raw water
- Pollishing to UPW-grade quality
- Distribution to process tools
- Assessment for reuse or discharge
Reducing water consumption is a major environmental focus, guided by industry efforts like the FO-98 committee.
Image Credit: Gorodenkoff/Shutterstock
Author summary: Experts discuss ultra pure water management.
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